Non-destructive and accurate characterization of high aspect ratio (HAR) and composite micro-trenches is essential for semiconductor inspection in fields like microelectromechanical systems (MEMS) and ...
(Nanowerk News) Optical measurement techniques collecting light intensity in the far-field such as conventional and confocal microscopy or coherence scanning interferometry (CSI) enable fast and ...
Optical Profilometry employs light to measure surface contours and roughness by analyzing the interaction between light waves and the surface under examination. It utilizes various principles such as ...
Topography becomes more important in quality assurance for manufacturing. This regards the characterization of macro-sized to medium optics and the optimization of a manufacturing process using a ...
Optical coherence tomography (OCT) is a light-based imaging technique currently used in clinical diagnostics to examine organs in vivo. The technique uses interferometry; in which light reflected from ...
In a recent study, Manish Garg, independent group leader at Max Planck Institute for Solid State Research (MPI FKF), ...
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